{
  "sprint": 254,
  "gate_epe_budget_nm": 3.0,
  "demag": 4.0,
  "optics": {
    "wavelength_nm": 193.0,
    "na": 0.75,
    "sigma_in": 0.4,
    "sigma_out": 0.8,
    "n_g": 41
  },
  "grating": {
    "period_nm": 400.0,
    "cd_nm": 200.0,
    "n_absorber": "(2+1j)",
    "nx": 256
  },
  "thin_mask_limit": {
    "thicknesses_nm": [
      40.0,
      20.0,
      10.0,
      5.0,
      2.0,
      1.0,
      0.5,
      0.25
    ],
    "max_order_error": [
      0.10927280269577272,
      0.07748976459727967,
      0.07452830869093434,
      0.05413264264150338,
      0.02748851385207424,
      0.014939346369909052,
      0.007794554865617667,
      0.003982085085456767
    ],
    "convergence_order_p": 0.9300277361850025,
    "monotone_tail": true,
    "error_at_thinnest": 0.003982085085456767,
    "tol": 0.02,
    "verdict": "GO",
    "interpretation": "RCWA reduces to the thin-mask model at first order or better, so a discrepancy at realistic thickness is attributable to 3-D mask physics rather than to a solver or convention error."
  },
  "prereg_control_as_written": {
    "criterion": "a mismatched absorber index must NOT pass the GO test",
    "holds": false,
    "runs": [
      {
        "n_wrong": "(1.5+0.5j)",
        "convergence_order_p": 0.9382553642434656,
        "monotone_tail": true,
        "error_at_thinnest": 0.006312465008325515,
        "passes_go_test": true
      },
      {
        "n_wrong": "(3+2j)",
        "convergence_order_p": 0.991837266699768,
        "monotone_tail": true,
        "error_at_thinnest": 0.004068352531785535,
        "passes_go_test": true
      },
      {
        "n_wrong": "(2+0.5j)",
        "convergence_order_p": 0.9466070112351818,
        "monotone_tail": true,
        "error_at_thinnest": 0.00600423951371169,
        "passes_go_test": true
      }
    ],
    "finding": "FALSIFIED. Every mismatched index PASSES the thin-mask limit test, because each absorber becomes transparent as t -> 0 and all models therefore agree at first order there regardless of index. The limit test validates the comparison MACHINERY (Fourier convention, incident calibration, order indexing); it does not validate the absorber model. The pre-registered control was too weak, and this is recorded rather than quietly replaced."
  },
  "index_discrimination": {
    "n_candidates": 323,
    "thickness_nm": 60.0,
    "true_index": [
      2.0,
      1.0
    ],
    "recovered_index": [
      2.0000000000000004,
      0.9000000000000002
    ],
    "recovery_error_real": 4.440892098500626e-16,
    "recovery_error_imag": 0.09999999999999976,
    "step_real": 0.1,
    "step_imag": 0.1,
    "l2_at_recovered": 0.2673798378930886,
    "l2_at_true": 0.26913266055199675,
    "l2_worst": 0.5947295565798002,
    "discrimination_ratio": 2.224287221004307,
    "recovered_within_one_step": true,
    "note": "A mismatched index PASSES thin_mask_limit_test \u2014 measured, not assumed. That test validates the comparison machinery, not the absorber model. This one supplies the discrimination the limit test cannot."
  },
  "aerial_convergence": {
    "rows": [
      {
        "thickness_nm": 20.0,
        "max_abs_intensity_diff": 0.08297500277251002,
        "contrast_thinmask": 0.40645287253574636,
        "cd_reading_valid": false
      },
      {
        "thickness_nm": 10.0,
        "max_abs_intensity_diff": 0.15125280031399901,
        "contrast_thinmask": 0.20640955863392763,
        "cd_reading_valid": false
      },
      {
        "thickness_nm": 5.0,
        "max_abs_intensity_diff": 0.1530267445043697,
        "contrast_thinmask": 0.1035288518843547,
        "cd_reading_valid": false
      },
      {
        "thickness_nm": 2.0,
        "max_abs_intensity_diff": 0.09486249572385586,
        "contrast_thinmask": 0.04144547440452332,
        "cd_reading_valid": false
      },
      {
        "thickness_nm": 1.0,
        "max_abs_intensity_diff": 0.05450835483919436,
        "contrast_thinmask": 0.020725117725402115,
        "cd_reading_valid": false
      },
      {
        "thickness_nm": 0.5,
        "max_abs_intensity_diff": 0.029113171657830894,
        "contrast_thinmask": 0.010362855576713275,
        "cd_reading_valid": false
      },
      {
        "thickness_nm": 0.25,
        "max_abs_intensity_diff": 0.015033899762441627,
        "contrast_thinmask": 0.005181464850975247,
        "cd_reading_valid": false
      }
    ],
    "monotone_tail": true
  },
  "cost_of_the_thin_mask_assumption": {
    "rows": [
      {
        "thickness_nm": 30.0,
        "contrast": 0.5889705915993537,
        "cd_reading_valid": true,
        "cd_thinmask_nm": 200.0,
        "cd_rcwa_nm": 230.6533123288364,
        "delta_cd_mask_nm": 30.653312328836392,
        "edge_shift_mask_nm": 15.326656164418239,
        "edge_shift_wafer_nm": 3.8316640411045597,
        "max_abs_intensity_diff": 0.07185161285989466
      },
      {
        "thickness_nm": 60.0,
        "contrast": 0.9103026694555622,
        "cd_reading_valid": true,
        "cd_thinmask_nm": 199.99999999999997,
        "cd_rcwa_nm": 244.5242355033981,
        "delta_cd_mask_nm": 44.52423550339813,
        "edge_shift_mask_nm": 22.262117751699122,
        "edge_shift_wafer_nm": 5.565529437924781,
        "max_abs_intensity_diff": 0.11986804282471766
      },
      {
        "thickness_nm": 90.0,
        "contrast": 0.9424170309041144,
        "cd_reading_valid": true,
        "cd_thinmask_nm": 200.00000000000003,
        "cd_rcwa_nm": 256.3939631685889,
        "delta_cd_mask_nm": 56.3939631685889,
        "edge_shift_mask_nm": 28.19698158429452,
        "edge_shift_wafer_nm": 7.04924539607363,
        "max_abs_intensity_diff": 0.1586005200784696
      }
    ],
    "nominal_thickness_nm": 60.0,
    "edge_shift_wafer_nm": 5.565529437924781,
    "gate_epe_budget_nm": 3.0,
    "ratio_to_budget": 1.8551764793082601,
    "reading": "The four-leg gate certifies edge placement to 3.0 nm RELATIVE TO the thin-mask model. Rigorous EM moves the printed edge by 5.57 nm at wafer scale on this grating \u2014 1.9x the budget the certificate defends. The certificates remain sound with respect to their stated model; what this measures is that the MODEL carries a systematic error larger than the budget, which is a statement about scope, not about soundness."
  },
  "determinism_ok": true,
  "spine_rc": 0,
  "readonly_files_unchanged": "4/4",
  "check_numbers_rc": 0
}